Deep trench module optimization for a more robust technology with reduced defect density at lower cost

Introduction and motivation. Once a new technology is released to manufacturing, it still has numerous possibilities for improvement. Continuous defect density reduction is mandatory to fulfill customer’s quality requirements. Technology marginalities need to be detected and solved to improve line yields and secure on time delivery. The production cost needs to be reduced so that the technology stays competitive. For a lot of projects these requirements are conflicting. We are presenting the results of a yield enhancement project on a 0.35m mixed signal technology where we achieved a significant cost reduction as well as a more robust technology.